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8B16014

Traceable three-dimensional nanometrology

Public support

  • Provider

    Ministry of Education, Youth and Sports

  • Programme

  • Call for proposals

  • Main participants

    Český metrologický institut

  • Contest type

    M2 - International cooperation

  • Contract ID

    MSMT-21096/2016-7

Alternative language

  • Project name in Czech

    Traceable three-dimensional nanometrology

  • Annotation in Czech

    The scientific and technical objectives of this project are to: 1. Reduce the 3D nanomeasurement uncertainty, by means of a bottom up approach, to less than 1 nm for nanodimensional measurands (including line width, height, pitch, and edge/width roughness) on engineered nanostructures and nanoparticles. In addition, to reduce the noise level of metrological AFMs (MAFMs) to 0.1 nm (rms) using a top-down approach, to raise the scanning speed up to 1 mm/s, and to extend the scanning range up to 25 mm/s by further developing the state-of-the-art optical and x-ray interferometry (XRI). 2. Develop reference materials for 3D nanometrology tools including AFM and Scanning Electron Microscopy (SEM). In particular, to realise test structures for characterising the tip geometry in AFMs and the beam size in SEMs and reference standards for width and sidewall roughness measurements. 3. Widen the understanding of probe-sample interactions in AFM and SEM measurements for reducing the measurement uncertainty. In particular, to study the tip-sample interaction force of AFM line width and nanoparticle measurements; to model the image formation of SEM; and to investigate the influence of humidity on AFM measurements. 4. Develop a hybrid metrology for merging measurement results from either different tools (e.g. AFM, SEM, Transmission Electron Microscopy (TEM), Mueller polarimetry and optical scatterometry) or different channels of a single tool. 5. Facilitate the take up of the technology and measurement infrastructure developed by the project by the measurement supply chain (accredited laboratories, instrument manufacturers) and end users (semiconductor industry, precision engineering, optical industry and nanoparticle researchers).

Scientific branches

  • R&D category

    ZV - Basic research

  • CEP classification - main branch

    FQ - Public health system, social medicine

  • CEP - secondary branch

  • CEP - another secondary branch

  • OECD FORD - equivalent branches <br>(according to the <a href="http://www.vyzkum.cz/storage/att/E6EF7938F0E854BAE520AC119FB22E8D/Prevodnik_oboru_Frascati.pdf">converter</a>)

Completed project evaluation

  • Provider evaluation

    U - Uspěl podle zadání (s publikovanými či patentovanými výsledky atd.)

  • Project results evaluation

    Following the condition that the candidate of financial contribution was evaluated and afterwards selected by international provider in accordance with the rules of the program the Ministry of Education, Youth ans Sports does not realize the evaluation of project results. The project is evaluated only after its approval by an international provider.

Solution timeline

  • Realization period - beginning

    Oct 1, 2016

  • Realization period - end

    Sep 30, 2019

  • Project status

    U - Finished project

  • Latest support payment

    Feb 12, 2019

Data delivery to CEP

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

  • Data delivery code

    CEP20-MSM-8B-U/01:1

  • Data delivery date

    Jun 18, 2020

Finance

  • Total approved costs

    4,834 thou. CZK

  • Public financial support

    2,532 thou. CZK

  • Other public sources

    0 thou. CZK

  • Non public and foreign sources

    2,302 thou. CZK