Traceable characterisation of nanostructured devices
Public support
Provider
Ministry of Education, Youth and Sports
Programme
—
Call for proposals
FP6-2005-Energy-4
Main participants
Český metrologický institut
Contest type
RP - Co-financing of EC programme
Contract ID
MSMT-45248/2013-7
Alternative language
Project name in Czech
Traceable characterisation of nanostructured devices
Annotation in Czech
The aim of the JRP is to develop traceable measurement and characterisation of physical and chemical properties of the next generation of integrated nano structured devices with sub 30 nm dimensions using novel 3D architectures. Improvement of non-destructive methods for the characterisation of nanolayers and buried interfaces, by chemical depth-profiling of nanolayers (up to 200 nm) with trace level sensitivity. Development of essential metrology to enable 3D nanoscale chemical imaging of organic electronic materials using new massive argon cluster sputtering combined with secondary ion mass spectrometry (SIMS). This will be done by 3D chemical characterisation of nanolayers and interfaces with depth resolutions of better than 10 nm at depths of up to400 nm and a spatial resolution better than 100 nm. Development of a novel method for 3D nano-electrical characterisation of organic semiconductor nanostructures and nanostructured self-assembled reference materials (with resolution better than 30 nm) for the metrological studies of the techniques.
Scientific branches
R&D category
ZV - Basic research
CEP classification - main branch
BG - Nuclear, atomic and molecular physics, accelerators
CEP - secondary branch
—
CEP - another secondary branch
—
OECD FORD - equivalent branches <br>(according to the <a href="http://www.vyzkum.cz/storage/att/E6EF7938F0E854BAE520AC119FB22E8D/Prevodnik_oboru_Frascati.pdf">converter</a>)
10304 - Nuclear physics
Completed project evaluation
Provider evaluation
U - Uspěl podle zadání (s publikovanými či patentovanými výsledky atd.)
Project results evaluation
Project focused on chemical and dimensional analysis of thin film systems using different measurement techniques (SIMS, X-ray reflection, SPM, etc.). CMI developed methods for modeling the local field distribution in photoconductive atomic force microscopy on organic thin films, used e.g. in solar cells.
Solution timeline
Realization period - beginning
Jan 1, 2013
Realization period - end
Jun 30, 2015
Project status
U - Finished project
Latest support payment
Feb 20, 2015
Data delivery to CEP
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data delivery code
CEP16-MSM-7A-U/01:1
Data delivery date
Oct 11, 2017
Finance
Total approved costs
1,370 thou. CZK
Public financial support
765 thou. CZK
Other public sources
0 thou. CZK
Non public and foreign sources
605 thou. CZK