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Technology development of DUV optics < 248 nm and cylindrical optics

Project goals

The project will focus on the development of DUV optics smaller than 248 nm and cylindrical optics. During its implementation, industrial research and experimental development will be carried out focused on two basic directions: * Implementation of production technology of optical elements for use in DUV (Deep Ultra Violet), * Implementation of production technology of cylindrical optics.

Keywords

DUV opticsoptical elements

Public support

  • Provider

    Ministry of Industry and Trade

  • Programme

    —

  • Call for proposals

    —

  • Main participants

    Meopta - optika, s.r.o.

  • Contest type

    OP - EU Operational Programme

  • Contract ID

    MPO 595168/21/61200/364

Alternative language

  • Project name in Czech

    Rozvoj technologie DUV optiky < 248 nm a cylindrické optiky

  • Annotation in Czech

    rojekt bude zaměřen na rozvoj technologie DUV optiky menší než 248 nm a cylindrické optiky. Při jeho realizaci bude prováděn průmyslový výzkum a experimentální vývoj zaměřený na dva základní směry: * Implementace výrobní technologie optických prvků pro využití v DUV (Deep Ultra Violet) oblasti, * Implementace výrobní technologie cylindrické optiky.

Scientific branches

  • R&D category

    VV - Exeperimental development

  • OECD FORD - main branch

    10306 - Optics (including laser optics and quantum optics)

  • OECD FORD - secondary branch

    —

  • OECD FORD - another secondary branch

    —

  • BH - Optics, masers and lasers

Completed project evaluation

  • Provider evaluation

    U - Uspěl podle zadání (s publikovanými či patentovanými výsledky atd.)

  • Project results evaluation

    The project met the expected outputs.

Solution timeline

  • Realization period - beginning

    Jan 15, 2021

  • Realization period - end

    Nov 10, 2023

  • Project status

    U - Finished project

  • Latest support payment

    Aug 31, 2021

Data delivery to CEP

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

  • Data delivery code

    CEP24-MPO-EG-U

  • Data delivery date

    Aug 19, 2024

Finance

  • Total approved costs

    31,997 thou. CZK

  • Public financial support

    0 thou. CZK

  • Other public sources

    0 thou. CZK

  • Non public and foreign sources

    21,187 thou. CZK

Basic information

Provider

Ministry of Industry and Trade

OECD FORD

Optics (including laser optics and quantum optics)

Solution period

15. 01. 2021 - 10. 11. 2023

Similar projects(10)

High resolution neutron monochromators based on Bragg difraction optics with cylindrically bent perfect single crystals (OC P7.003) Single crystal materials for medical instruments, power supply, optics and special technique. (FF-P/125) Center of digital optics (TE01020229)