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Optimization of electron-beam production technology

Public support

  • Provider

    Ministry of Industry and Trade

  • Programme

    TIP

  • Call for proposals

    TIP 1 (SMPO2009/01)

  • Main participants

  • Contest type

    VS - Public tender

  • Contract ID

    FR-TI1/576

Alternative language

  • Project name in Czech

    Optimalizace výrobních postupů v elektronové litografii

  • Annotation in Czech

    Markantní zlepšení stávajícího stavu s cílem udržet významné postavení v oboru.

Scientific branches

  • R&D category

    AP - Applied research

  • CEP classification - main branch

    JP - Industrial processes and processing

  • CEP - secondary branch

    BM - Solid-state physics and magnetism

  • CEP - another secondary branch

  • OECD FORD - equivalent branches <br>(according to the <a href="http://www.vyzkum.cz/storage/att/E6EF7938F0E854BAE520AC119FB22E8D/Prevodnik_oboru_Frascati.pdf">converter</a>)

    10302 - Condensed matter physics (including formerly solid state physics, supercond.)<br>20501 - Materials engineering<br>20705 - Remote sensing<br>20706 - Marine engineering, sea vessels<br>20707 - Ocean engineering

Completed project evaluation

  • Provider evaluation

    U - Uspěl podle zadání (s publikovanými či patentovanými výsledky atd.)

  • Project results evaluation

    The goals and material contents of the project under subject were fulfilled within the defined extent and terms.

Solution timeline

  • Realization period - beginning

    Jul 1, 2009

  • Realization period - end

    Jun 30, 2012

  • Project status

    U - Finished project

  • Latest support payment

    Mar 23, 2012

Data delivery to CEP

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

  • Data delivery code

    CEP13-MPO-FR-U/02:2

  • Data delivery date

    Jul 14, 2014

Finance

  • Total approved costs

    15,004 thou. CZK

  • Public financial support

    11,724 thou. CZK

  • Other public sources

    0 thou. CZK

  • Non public and foreign sources

    3,279 thou. CZK