Pulse mode and microwave plasma sources - research and applications
Project goals
The aim of the project is to develop, characterize and utilise microwave and pulse-mode low-temperature plasma sources. We intend to combine experimental and theoretical approaches in order to optimize these sources to their intended applications. We will investigate: sources of precursor ions for analytical techniques including organic mass spectrometry, Selected Ion Flow Tube Mass Spectrometzr, SIFT-MS, a supersonic discharge source of intermediate molecular radicals important for atmospheric chemistry, pulsed glow discharge for Fourier Transform Infrared spectrometry studies of radicals, sources for deposition of thin films at reduced and atmospheric pressure, low pressure magnetron and plasma-jet sources driven by DC, RF and microwave power. The constructed plasma sources will be characterized in continuous and pulsed modes of operation using a range of time-resolved diagnostic techniques including Langmuir probe, optical emission spectroscopy, mass-spectrometry and ion flux detection in combination with computer models of plasma processes.
Keywords
zdroje plazmatudiagnostikahmotnostní spektrometrieOESklastrymodifikace povrchů
Public support
Provider
Czech Science Foundation
Programme
Standard projects
Call for proposals
Standardní projekty 12 (SGA02009GA-ST)
Main participants
—
Contest type
VS - Public tender
Contract ID
202/09/0800
Alternative language
Project name in Czech
Výzkum a použití impulsních a mikrovlnných zdrojů plazmatu
Annotation in Czech
Experimentálně prozkoumat procesy v mikrovlnných a impulsních zdrojích: ss magnetron, ss a vf plazmová tryska, mikrovlnné výboje pro hmotnostní spektrometry. Implementovat zdokonalené diagnostické metody v těchto zdrojích plazmatu s ohledem na jejich analytické, atmosférické a technologické využití.
Scientific branches
Completed project evaluation
Provider evaluation
V - Vynikající výsledky projektu (s mezinárodním významem atd.)
Project results evaluation
The project was excellent, both in terms of expertise and in terms of disbursement of funds.
Solution timeline
Realization period - beginning
Jan 1, 2009
Realization period - end
Dec 31, 2011
Project status
U - Finished project
Latest support payment
Apr 16, 2011
Data delivery to CEP
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data delivery code
CEP12-GA0-GA-U/02:2
Data delivery date
May 2, 2016
Finance
Total approved costs
4,371 thou. CZK
Public financial support
4,371 thou. CZK
Other public sources
0 thou. CZK
Non public and foreign sources
0 thou. CZK
Basic information
Recognised costs
4 371 CZK thou.
Public support
4 371 CZK thou.
100%
Provider
Czech Science Foundation
CEP
BL - Plasma physics and discharge through gases
Solution period
01. 01. 2009 - 31. 12. 2011