Growth of nanostructures by electron beam
Project goals
We will combine techniques of electron lithoghraphy and OMCVD (Organic Molecule Chemical Vapor Deposition) for microelectronics, catalysis and gas sensor technology. E-beam irradiation will induce synthesis of compounds by using metal-organic precursors.The prepared structure composition will be investigated by means of the laboratory and synchrotron radiation photoelectron spectroscopy. The structure will be studied by electron microscopy SEM and HRTEM. Single-wire sensors conductivity will be investigated by STM in conductive mode and by using nanomanipulators in SEM.
Keywords
Public support
Provider
Ministry of Education, Youth and Sports
Programme
KONTAKT
Call for proposals
KONTAKT 6 (SMSM2008ME3)
Main participants
—
Contest type
VS - Public tender
Contract ID
5265/2010-32
Alternative language
Project name in Czech
Růst nanostruktur elektronovým svazkem.
Annotation in Czech
Kombinace elektronové litografie s metodou růstu samouspořádaných nanostruktur OMCVD (Organic Molecule Chemical Vapor Deposition) pro mikroelektroniku, katalýzu a technologie plynových senzorů. Ozařování elektronovým svazkem bude kombinováno s procesem syntézy sloučenin z metalorganických prekurzorů. Připravené objekty budou studovány z hlediska složení fotoelektronovou spektroskopií, jak laboratorní XPS, tak synchrotronovou SRPES. Struktura systémů bude studována metodami SEM a HRTEM (Dijon). V případěpolovodivých nanodrátových senzorů bude studována vodivost speciálně upraveným STM (Dijon) a nanomanipulátory integrovanými v SEM (Praha).
Scientific branches
R&D category
ZV - Basic research
CEP classification - main branch
BM - Solid-state physics and magnetism
CEP - secondary branch
BL - Plasma physics and discharge through gases
CEP - another secondary branch
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10302 - Condensed matter physics (including formerly solid state physics, supercond.)
10305 - Fluids and plasma physics (including surface physics)
Completed project evaluation
Provider evaluation
U - Uspěl podle zadání (s publikovanými či patentovanými výsledky atd.)
Project results evaluation
Investigation of metal-oxide catalyst films was based on use of complementary methods. In Dijon we performed high resolution transmission electron microscopy. In Prague French partners used scanning electron microscopy and atomic force microscopy.
Solution timeline
Realization period - beginning
Apr 1, 2009
Realization period - end
Dec 31, 2010
Project status
U - Finished project
Latest support payment
Jul 15, 2010
Data delivery to CEP
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data delivery code
CEP11-MSM-ME-U/01:1
Data delivery date
Jun 30, 2011
Finance
Total approved costs
106 thou. CZK
Public financial support
106 thou. CZK
Other public sources
0 thou. CZK
Non public and foreign sources
0 thou. CZK
Recognised costs
106 CZK thou.
Public support
106 CZK thou.
0%
Provider
Ministry of Education, Youth and Sports
CEP
BM - Solid-state physics and magnetism
Solution period
01. 04. 2009 - 31. 12. 2010