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OC09079

Theory of electron scattering for chemical lithography

Public support

  • Provider

    Ministry of Education, Youth and Sports

  • Programme

    COST

  • Call for proposals

    COST 7 (SMSM2009OC4)

  • Main participants

  • Contest type

    VS - Public tender

  • Contract ID

    1147/2010-32

Alternative language

  • Project name in Czech

    Teorie elektronového rozptylu pro potřeby chemické lithografie

  • Annotation in Czech

    Vypracování výpočtových metod a provedení výpočtů pro vibrační excitaci, disociaci a ionizaci molekul nárazem elektronu v procesech, které jsou důležité pro chemickou lithografii a inovaci technologických aplikací.

Scientific branches

  • R&D category

    ZV - Basic research

  • CEP classification - main branch

    CF - Physical chemistry and theoretical chemistry

  • CEP - secondary branch

    BE - Theoretical physics

  • CEP - another secondary branch

  • OECD FORD - equivalent branches <br>(according to the <a href="http://www.vyzkum.cz/storage/att/E6EF7938F0E854BAE520AC119FB22E8D/Prevodnik_oboru_Frascati.pdf">converter</a>)

    10301 - Atomic, molecular and chemical physics (physics of atoms and molecules including collision, interaction with radiation, magnetic resonances, Mössbauer effect)<br>10403 - Physical chemistry

Completed project evaluation

  • Provider evaluation

    V - Vynikající výsledky projektu (s mezinárodním významem atd.)

  • Project results evaluation

    A new nonlocal resonance model for HCl molecule was constructed. A method was developed fro calculation of resonance energies and widths applicable also to polyatomic molecules. A computational method was developed for ab initio calculations of theoretical vibrational EELS spectra for larger molecules than it was possible so far. The results were published in important international journals.

Solution timeline

  • Realization period - beginning

    Apr 1, 2009

  • Realization period - end

    Nov 30, 2011

  • Project status

    U - Finished project

  • Latest support payment

    Mar 2, 2011

Data delivery to CEP

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

  • Data delivery code

    CEP12-MSM-OC-U/01:1

  • Data delivery date

    Jul 12, 2012

Finance

  • Total approved costs

    1,250 thou. CZK

  • Public financial support

    1,250 thou. CZK

  • Other public sources

    0 thou. CZK

  • Non public and foreign sources

    0 thou. CZK