Novel plasma sources for film deposition and surface modification
Public support
Provider
Ministry of Education, Youth and Sports
Programme
COST
Call for proposals
COST 8 (SMSM2010OC5)
Main participants
—
Contest type
VS - Public tender
Contract ID
1081/2011-320
Alternative language
Project name in Czech
Nové plazmové zdroje pro depozici vrstev a modifikaci povrchů
Annotation in Czech
Cílem projektu je objasnění fyzikální podstaty činnosti tří nových magnetronových systémů pro rychlou depozici vrstev a pulzní magnetronové depozice vrstev na bázi uhlíku a nových vrstev Si-B-C-N s mimořádně vysokou teplotní stabilitou.
Scientific branches
R&D category
ZV - Basic research
CEP classification - main branch
BL - Plasma physics and discharge through gases
CEP - secondary branch
JI - Composite materials
CEP - another secondary branch
JJ - Other materials
OECD FORD - equivalent branches <br>(according to the <a href="http://www.vyzkum.cz/storage/att/E6EF7938F0E854BAE520AC119FB22E8D/Prevodnik_oboru_Frascati.pdf">converter</a>)
10305 - Fluids and plasma physics (including surface physics)<br>20502 - Paper and wood<br>20503 - Textiles; including synthetic dyes, colours, fibres (nanoscale materials to be 2.10; biomaterials to be 2.9)<br>20505 - Composites (including laminates, reinforced plastics, cermets, combined natural and synthetic fibre fabrics; filled composites)<br>21001 - Nano-materials (production and properties)<br>21002 - Nano-processes (applications on nano-scale); (biomaterials to be 2.9)
Completed project evaluation
Provider evaluation
V - Vynikající výsledky projektu (s mezinárodním významem atd.)
Project results evaluation
Non-stationary model was used for explanation of high-power impulse magnetron sputtering. Two pulsed magnetron systems were used to prepare non-conductive oxides and Ta-O-N oxynitrides, high-temperature Si-B-C-N materials and nanostructured Zr-B-C-N films. The results were published in 5 papers in international journals and presented in 12 contributions at international conferences.
Solution timeline
Realization period - beginning
May 1, 2010
Realization period - end
Dec 31, 2012
Project status
U - Finished project
Latest support payment
Feb 27, 2012
Data delivery to CEP
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data delivery code
CEP13-MSM-OC-U/01:1
Data delivery date
Jun 28, 2013
Finance
Total approved costs
990 thou. CZK
Public financial support
990 thou. CZK
Other public sources
0 thou. CZK
Non public and foreign sources
0 thou. CZK