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2 826 (0,09s) •

Project

Structures for spintronics and quantum phenomena created by electron beam lithography (KAN400100652)

structures will be created by a newly installed electron beam lithography....

BM - Fyzika pevných látek a magnetismus

  • 2006 - 2010
    • •
  • 54 436 tis. Kč
    • •
  • 54 436 tis. Kč
    • •
  • AV ČR
Project

Design and manufacturing of advanced diffractive optical elements and their application to the industry (FV40197)

by techniques of electron beam lithography. Optical and structural control of fabricated and their fabrication by electron beam lithography technique. Optical and structural control of electron beam l...

Optics (including laser optics and quantum optics)

  • 2019 - 2022
    • •
  • 22 829 tis. Kč
    • •
  • 14 970 tis. Kč
    • •
  • MPO
Project

Optimization of electron-beam production technology (FR-TI1/576)

Important improvement of the actual technology....

JP - Průmyslové procesy a zpracování

  • 2009 - 2012
    • •
  • 15 004 tis. Kč
    • •
  • 11 724 tis. Kč
    • •
  • MPO
Project

Theory of electron scattering for chemical lithography (OC09079)

by an electron impact in processes that of interest to chemical lithography, i.e at the molecular level is one of the great challenges of modern research. In electron beam be achieved by a low-energy electron impa...

CF - Fyzikální chemie a teoretická chemie

  • 2009 - 2011
    • •
  • 1 250 tis. Kč
    • •
  • 1 250 tis. Kč
    • •
  • MŠMT
Project

Research and development of Security printing (EG15_018/0004777)

The core of the project is the research activity of electron lithography and the modernization of the lithograph as such. The aim of the project is: 1) Verified Technology - Technology of recording and laminating mesh structures f...

JR - Ostatní strojírenství

  • 2015 - 2021
    • •
  • 35 441 tis. Kč
    • •
  • 8 826 tis. Kč
    • •
  • MPO
Project

Center of electron and photonic optics (TN01000008)

The Centre unifies all the key academic and industrial players in Czechia dealing with R&D and technology transfer in electron microscopy and lithography, optical microscopy and spectroscopy, laser and fiber technologies, optical an...

Optics (including laser optics and quantum optics)

  • 2018 - 2022
    • •
  • 398 305 tis. Kč
    • •
  • 312 000 tis. Kč
    • •
  • TA ČR
Project

Advanced nano/microstructure creation using ion and electron beam surface modification with potential use in microfluid and lab-on-chip applications (GA22-10536S)

electrons will be used for direct lithography and lithography using a mask to createThe interactions of energetic ions and electrons with the surfaces of thermoplastics and glasses will be used to obtain new hiera...

Materials engineering

  • 2022 - 2024
    • •
  • 9 792 tis. Kč
    • •
  • 9 792 tis. Kč
    • •
  • GA ČR
Project

Submicrometer relief diffractive structures made by electron-beam lithography. (IBS2065014)

E-beam lithography is generally recognized and used tool in microelectronics to generate geometrical patterns with feture siye under one micrometer. Considering e-beam lithography with the resolution of 0.1um it is possible to use t...

JA - Elektronika a optoelektronika, elektrotechnika

  • 2000 - 2002
    • •
  • 2 088 tis. Kč
    • •
  • 1 433 tis. Kč
    • •
  • AV ČR
Project

CGH, synthetic hologram 3D (TH03020179)

This is research in the field of modern photonics and synthetic lithography. The aim is to bring to market a range of advanced technologies and products that meet the strictest safety criteria in the product (hologram). Results of the projec...

Optics (including laser optics and quantum optics)

  • 2018 - 2020
    • •
  • 4 550 tis. Kč
    • •
  • 2 371 tis. Kč
    • •
  • TA ČR
Project

CONJUGATED SILICON ? BASED POLYMER RESISTS FOR NANOTECHNOLOGIES (IAA100100622)

Classical optical and electron lithography continues to be the main technology rules.Emerging nanoimprint lithography in polymers has already demonstrated 10nm electron-beams will thus have to undergo profound chan...

BM - Fyzika pevných látek a magnetismus

  • 2006 - 2009
    • •
  • 5 246 tis. Kč
    • •
  • 5 246 tis. Kč
    • •
  • AV ČR
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