Traceable measurements of small forces and local mechanical properties

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00177016%3A_____%2F11%3A%230000381" target="_blank" >RIV/00177016:_____/11:#0000381 - isvavai.cz</a>

Result on the web

<a href="http://dx.doi.org/10.1088/0957-0233/22/9/094007" target="_blank" >http://dx.doi.org/10.1088/0957-0233/22/9/094007</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1088/0957-0233/22/9/094007" target="_blank" >10.1088/0957-0233/22/9/094007</a>

Result language

angličtina

Original language name

Traceable measurements of small forces and local mechanical properties

Original language description

Measurement of local mechanical properties is an important topic in the fields of nanoscale device fabrication, thin film deposition and composite material development. Nanoindentation instruments are commonly used to study hardness and related mechanical properties at the nanoscale. However, traceability and uncertainty aspects of the measurement process often remain left aside. In this contribution, the use of a commercial nanoindentation instrument for metrology purposes will be discussed. Full instrument traceability, provided using atomic force microscope cantilevers and a mass comparator (normal force), interferometer (depth) and atomic force microscope (area function) is described. The uncertainty of the loading/unloading curve measurements willbe analyzed and the resulting uncertainties for quantities, that are computed from loading curves such as hardness or elastic modulus, are studied. For this calculation a combination of uncertainty propagation law and Monte Carlo uncerta

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BM - Solid-state physics and magnetism

OECD FORD branch

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Project

<a href="/en/project/KAN311610701" target="_blank" >KAN311610701: Nanometrology using methods of scanning probe microscopy</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2011

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Measurement Science and Technology

ISSN

0957-0233

e-ISSN

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Volume of the periodical

22

Issue of the periodical within the volume

9

Country of publishing house

GB - UNITED KINGDOM

Number of pages

7

Pages from-to

094007-094013

UT code for WoS article

000294764800008

EID of the result in the Scopus database

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