A long-range scanning probe microscope for automotive reflector optical quality inspection
Result description
A long-range scanning probe microscope (SPM) designed for the measurement of micro-and nanoscale forms, roughness and surface defects was constructed. It is based on commercial crossed roller bearing stages combined with piezoceramic actuators used to compensate the imperfections of the bearing mechanism. Three interferometers are used for all three-axis translation monitoring and feedback. For stage rotation monitoring (axis normal to the sample surface), an autocollimator is used. For nonplanarity compensation and two more axis rotation compensations (axes parallel to sample surface), an optical quality reference plane and a set of tunneling current sensors are used. The developed system enables us to perform large-scale measurements of the surface form with no influence of positioning system non-planarities and piezoceramic component hysteresis. In contrast to specialized metrology systems, e. g. using a six-axis interferometer for stage motion monitoring and feedback, this approach
Keywords
The result's identifiers
Result code in IS VaVaI
Result on the web
DOI - Digital Object Identifier
Alternative languages
Result language
angličtina
Original language name
A long-range scanning probe microscope for automotive reflector optical quality inspection
Original language description
A long-range scanning probe microscope (SPM) designed for the measurement of micro-and nanoscale forms, roughness and surface defects was constructed. It is based on commercial crossed roller bearing stages combined with piezoceramic actuators used to compensate the imperfections of the bearing mechanism. Three interferometers are used for all three-axis translation monitoring and feedback. For stage rotation monitoring (axis normal to the sample surface), an autocollimator is used. For nonplanarity compensation and two more axis rotation compensations (axes parallel to sample surface), an optical quality reference plane and a set of tunneling current sensors are used. The developed system enables us to perform large-scale measurements of the surface form with no influence of positioning system non-planarities and piezoceramic component hysteresis. In contrast to specialized metrology systems, e. g. using a six-axis interferometer for stage motion monitoring and feedback, this approach
Czech name
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Czech description
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Classification
Type
Jx - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
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Result continuities
Project
FT-TA5/114: Development of technology of PECVD films formation for automotive lighting equipment
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2011
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Measurement Science and Technology
ISSN
0957-0233
e-ISSN
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Volume of the periodical
22
Issue of the periodical within the volume
9
Country of publishing house
GB - UNITED KINGDOM
Number of pages
7
Pages from-to
094011-094017
UT code for WoS article
000294764800012
EID of the result in the Scopus database
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Result type
Jx - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP
BM - Solid-state physics and magnetism
Year of implementation
2011