Intercomparison of flatness measurements of an optical flat at apertures of up to 150 mm in diameter

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00177016%3A_____%2F17%3AN0000001" target="_blank" >RIV/00177016:_____/17:N0000001 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1088/1681-7575/aa535c" target="_blank" >http://dx.doi.org/10.1088/1681-7575/aa535c</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1088/1681-7575/aa535c" target="_blank" >10.1088/1681-7575/aa535c</a>

Result language
angličtina
Original language name
Intercomparison of flatness measurements of an optical flat at apertures of up to 150 mm in diameter
Original language description
Recently, a scientific comparison of flatness measuring instruments at European National Metrology Institutes (NMIs) was performed in the framework of EURAMET. The specimen was a well-polished optical surface with a maximum measurement aperture of 150 mm in diameter. Here, we present an evaluation concept, which allows the determination of a mean flatness map taking into account different lateral resolutions of the instruments and different orientations of the specimen during measurement. We found that all measurements are in agreement with the mean flatness map within the uncertainty intervals stated by the participants. The aim of this scientific comparison is to specify an appropriate operation and evaluation procedure for future comparisons.
Czech name
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Czech description
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Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10306 - Optics (including laser optics and quantum optics)

Publication year
2017
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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