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Measurement uncertainty simulation by Monte Carlo method in nanometrology

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00177016%3A_____%2F19%3AN0000170" target="_blank" >RIV/00177016:_____/19:N0000170 - isvavai.cz</a>

  • Alternative codes found

    RIV/00216305:26210/19:PU135345

  • Result on the web

    <a href="https://www.mmscience.eu/journal/issues/October%202019/articles/measurement-uncertainty-simulation-by-monte-carlo-method-in-nanometrology" target="_blank" >https://www.mmscience.eu/journal/issues/October%202019/articles/measurement-uncertainty-simulation-by-monte-carlo-method-in-nanometrology</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.17973/MMSJ.2019_10_2018112" target="_blank" >10.17973/MMSJ.2019_10_2018112</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Measurement uncertainty simulation by Monte Carlo method in nanometrology

  • Original language description

    This paper deals with determination of uncertainty and individual contributions to the measurement uncertainty on the CMM SIOS NNM-1 instrument fitted with the touch-probe scanning system Gannen XP. Manufacturer SIOS designates this machine as nano-CMM. Two non-simulation methods to determine the measurement uncertainty, the substitution and multi-position methods are addressed in detail [Sramek, Jankovych 2018]. Ruby balls with various nominal diameters are used as the measured objects. One simulation method to determine the measurement uncertainty, the Monte Carlo method, is also addressed in this paper. The paper also summarizes and specifies calculation methods to determine the measurement uncertainty, and provides results of representative sets of measurements, including determination of the expanded measurement uncertainty. This paper contains novel conclusions in the area of uncertainty measurement of nano-CMMs.

  • Czech name

  • Czech description

Classification

  • Type

    J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database

  • CEP classification

  • OECD FORD branch

    21100 - Other engineering and technologies

Result continuities

  • Project

  • Continuities

    V - Vyzkumna aktivita podporovana z jinych verejnych zdroju

Others

  • Publication year

    2019

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    MM Science Journal

  • ISSN

    1803-1269

  • e-ISSN

    1805-0476

  • Volume of the periodical

    2019

  • Issue of the periodical within the volume

    October 2019

  • Country of publishing house

    CZ - CZECH REPUBLIC

  • Number of pages

    7

  • Pages from-to

    2998-3004

  • UT code for WoS article

    000532567900009

  • EID of the result in the Scopus database