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Time-resolved probe diagnistics of pulsed dc magnetron discharge during deposition of TiOx layers

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F06%3A00003042" target="_blank" >RIV/00216208:11320/06:00003042 - isvavai.cz</a>

  • Result on the web

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    angličtina

  • Original language name

    Time-resolved probe diagnistics of pulsed dc magnetron discharge during deposition of TiOx layers

  • Original language description

    Time-resolved probe diagnistics of pulsed dc magnetron discharge during deposition of TiOx layers

  • Czech name

    Sondová diadnostika sondového výboje v magnetronu během depozice TiOx vrstev

  • Czech description

    Sondová diadnostika sondového výboje v magnetronu během depozice TiOx vrstev

Classification

  • Type

    J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

  • CEP classification

    BL - Plasma physics and discharge through gases

  • OECD FORD branch

Result continuities

  • Project

  • Continuities

    Z - Vyzkumny zamer (s odkazem do CEZ)

Others

  • Publication year

    2006

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Surface and Coatings Technology

  • ISSN

    0257-8972

  • e-ISSN

  • Volume of the periodical

    21

  • Issue of the periodical within the volume

    neuvedeno

  • Country of publishing house

    CH - SWITZERLAND

  • Number of pages

    8

  • Pages from-to

    2512-2519

  • UT code for WoS article

  • EID of the result in the Scopus database