Time-resolved probe diagnistics of pulsed dc magnetron discharge during deposition of TiOx layers
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F06%3A00003042" target="_blank" >RIV/00216208:11320/06:00003042 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Time-resolved probe diagnistics of pulsed dc magnetron discharge during deposition of TiOx layers
Original language description
Time-resolved probe diagnistics of pulsed dc magnetron discharge during deposition of TiOx layers
Czech name
Sondová diadnostika sondového výboje v magnetronu během depozice TiOx vrstev
Czech description
Sondová diadnostika sondového výboje v magnetronu během depozice TiOx vrstev
Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
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Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2006
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Surface and Coatings Technology
ISSN
0257-8972
e-ISSN
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Volume of the periodical
21
Issue of the periodical within the volume
neuvedeno
Country of publishing house
CH - SWITZERLAND
Number of pages
8
Pages from-to
2512-2519
UT code for WoS article
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EID of the result in the Scopus database
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