Magnetron Deposited TiO2 Thin Films - Crystallization and Temperature Dependence of Microstructure and Phase Composition

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F08%3A00206839" target="_blank" >RIV/00216208:11320/08:00206839 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Magnetron Deposited TiO2 Thin Films - Crystallization and Temperature Dependence of Microstructure and Phase Composition

Original language description

Temperature dependence of microstructure and phase composition of two sets of nanocrystalline TiO2 thin Films magnetron deposited oil glass and silicon substrates have been Studied by X-ray scattering. X-ray powder diffraction patterns were measured in parallel beam optics and evaluated by the total pattern fitting. After annealing, the amorphous films are crystallized, the nanocrystalline films consisting of anatase and rutile are partially crystallized while pure nanocrystalline anatase films remain nearly unchanged. With increasing temperature above 400 degrees C significant increase of crystallite size and transformation of anatase into rutile after 700 degrees C can be observed.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BM - Solid-state physics and magnetism

OECD FORD branch

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Project

<a href="/en/project/GA106%2F06%2F0327" target="_blank" >GA106/06/0327: Crystallization of amorphous and nanocrystalline thin films</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2008

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Zeitschrift für Kristallographie

ISSN

0044-2968

e-ISSN

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Volume of the periodical

27

Issue of the periodical within the volume

27

Country of publishing house

DE - GERMANY

Number of pages

8

Pages from-to

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UT code for WoS article

000264441800032

EID of the result in the Scopus database

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