RF Magnetron Sputtering of Tin in Ar/n-hexane Working Gas Mixture
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F09%3A00207121" target="_blank" >RIV/00216208:11320/09:00207121 - isvavai.cz</a>
Alternative codes found
RIV/44555601:13440/09:00004906
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
RF Magnetron Sputtering of Tin in Ar/n-hexane Working Gas Mixture
Original language description
Composite films of tin and hydrocarbon plasma polymer were prepared by RF magnetron sputtering in a working gas mixture consisting of Ar and n-hexane vapours. The size of the grains affects the electrical properties of the films.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2009
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Papers of 17th Symposium on Application of Plasma Processe - Visegrad Workshop on Research of Plasma Physics
ISBN
978-80-89186-46-4
ISSN
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e-ISSN
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Number of pages
2
Pages from-to
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Publisher name
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Place of publication
Liptovský Ján, Slovakia
Event location
Liptovský Ján, Slovakia
Event date
Jan 1, 2009
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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