Study of Plasma System by OES (Optical Emission Spectroscopy)

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F11%3A10109803" target="_blank" >RIV/00216208:11320/11:10109803 - isvavai.cz</a>
Result on the web
<a href="http://www.mff.cuni.cz/veda/konference/wds/proc/pdf11/WDS11_231_f2_Kolpakova.pdf" target="_blank" >http://www.mff.cuni.cz/veda/konference/wds/proc/pdf11/WDS11_231_f2_Kolpakova.pdf</a>
DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Study of Plasma System by OES (Optical Emission Spectroscopy)
Original language description
Low-temperature and low-pressure plasma was investigated by OES (optical emission spectroscopy) in the range 200-1100 nm. For displaying measured emission spectra and identification of spectrum lines the software Spectrum Analyzer was used. Two modes ofglow discharge present in the DC cylindrical magnetron apparatus which were previously researched by a mass spectrometer were studied by OES. The changes in the spectral range 300-600 nm during the transition between discharge modes are contributed to the emission of metal particles sputtered from the cathode material.
Czech name
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Czech description
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Publication year
2011
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
WDS'11 Proceedings of Contributed Papers: Part II ? Physics of Plasmas and Ionized Media
ISBN
978-80-7378-185-9
ISSN
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e-ISSN
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Number of pages
6
Pages from-to
180-185
Publisher name
Matfyzpress
Place of publication
Praha
Event location
Praha
Event date
May 31, 2011
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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