Computational study of sheath structure for plasma-assisted technologies in the presence of electronegative plasma
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F12%3A10130630" target="_blank" >RIV/00216208:11320/12:10130630 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1016/j.vacuum.2011.04.005" target="_blank" >http://dx.doi.org/10.1016/j.vacuum.2011.04.005</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.vacuum.2011.04.005" target="_blank" >10.1016/j.vacuum.2011.04.005</a>
Alternative languages
Result language
angličtina
Original language name
Computational study of sheath structure for plasma-assisted technologies in the presence of electronegative plasma
Original language description
A detailed description of plasma solid interaction is desirable for many technological applications such as plasma surface treatment and also for the development of plasma diagnostic techniques. To solve this rather complex problem, especially in the case of highly collisional or chemically active plasmas, methods of computational physics have to be used. In this paper, we present results of two-dimensional simulations based on the combination of molecular dynamics with particle-in-cell force calculation and the Monte Carlo method. An electropositive argon plasma with parameters taken from a DC glow discharge and an idealized Ar/O-2 plasma were studied for uneven substrates in order to determine the behaviour of plasmas with different electronegativities.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
<a href="/en/project/GAP205%2F10%2F0979" target="_blank" >GAP205/10/0979: Study of the interaction of chemically active plasmas with solid surfaces at medium and higher pressures</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)<br>S - Specificky vyzkum na vysokych skolach
Others
Publication year
2012
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Vacuum
ISSN
0042-207X
e-ISSN
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Volume of the periodical
86
Issue of the periodical within the volume
9
Country of publishing house
GB - UNITED KINGDOM
Number of pages
3
Pages from-to
1220-1222
UT code for WoS article
000302839400003
EID of the result in the Scopus database
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