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Computational study of sheath structure for plasma-assisted technologies in the presence of electronegative plasma

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F12%3A10130630" target="_blank" >RIV/00216208:11320/12:10130630 - isvavai.cz</a>

  • Result on the web

    <a href="http://dx.doi.org/10.1016/j.vacuum.2011.04.005" target="_blank" >http://dx.doi.org/10.1016/j.vacuum.2011.04.005</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.1016/j.vacuum.2011.04.005" target="_blank" >10.1016/j.vacuum.2011.04.005</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Computational study of sheath structure for plasma-assisted technologies in the presence of electronegative plasma

  • Original language description

    A detailed description of plasma solid interaction is desirable for many technological applications such as plasma surface treatment and also for the development of plasma diagnostic techniques. To solve this rather complex problem, especially in the case of highly collisional or chemically active plasmas, methods of computational physics have to be used. In this paper, we present results of two-dimensional simulations based on the combination of molecular dynamics with particle-in-cell force calculation and the Monte Carlo method. An electropositive argon plasma with parameters taken from a DC glow discharge and an idealized Ar/O-2 plasma were studied for uneven substrates in order to determine the behaviour of plasmas with different electronegativities.

  • Czech name

  • Czech description

Classification

  • Type

    J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

  • CEP classification

    BL - Plasma physics and discharge through gases

  • OECD FORD branch

Result continuities

  • Project

    <a href="/en/project/GAP205%2F10%2F0979" target="_blank" >GAP205/10/0979: Study of the interaction of chemically active plasmas with solid surfaces at medium and higher pressures</a><br>

  • Continuities

    P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)<br>S - Specificky vyzkum na vysokych skolach

Others

  • Publication year

    2012

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Vacuum

  • ISSN

    0042-207X

  • e-ISSN

  • Volume of the periodical

    86

  • Issue of the periodical within the volume

    9

  • Country of publishing house

    GB - UNITED KINGDOM

  • Number of pages

    3

  • Pages from-to

    1220-1222

  • UT code for WoS article

    000302839400003

  • EID of the result in the Scopus database