E-beam lithography processing of Au-nanowire contacts for development of gas sensors based on tungsten-oxide nanorods self-assembled on mica

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F12%3A10130661" target="_blank" >RIV/00216208:11320/12:10130661 - isvavai.cz</a>

Result on the web

<a href="http://dx.doi.org/10.1504/IJNT.2012.046755" target="_blank" >http://dx.doi.org/10.1504/IJNT.2012.046755</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1504/IJNT.2012.046755" target="_blank" >10.1504/IJNT.2012.046755</a>

Result language

angličtina

Original language name

E-beam lithography processing of Au-nanowire contacts for development of gas sensors based on tungsten-oxide nanorods self-assembled on mica

Original language description

This work describes the processing of Au nanowire arrays on insulating substrate developed to contact tungsten-oxide nanorods self-organised on the mica surface. The combination of electron beam lithography in scanning electron microscope and lift-off process is shown to be effective in fabricating nanocontact finger patterns with a line width of about 270 nm and 400 nm on bare and WO3 nanorod covered mica surfaces, respectively, separated by a few micrometre distance. It is shown that at right selection of the distance between Au nanowires, the applied procedure makes possible to contact WO3 nanorods of different length and density even if the nanostructures do not form an interconnected net. It opens the way for fabrication of single-wire nanosensorsgrown on insulating substrates.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BM - Solid-state physics and magnetism

OECD FORD branch

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Project

<a href="/en/project/GD202%2F09%2FH041" target="_blank" >GD202/09/H041: Physics of nanostructures</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)<br>S - Specificky vyzkum na vysokych skolach

Publication year

2012

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

International Journal of Nanotechnology

ISSN

1475-7435

e-ISSN

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Volume of the periodical

9

Issue of the periodical within the volume

8-9

Country of publishing house

GB - UNITED KINGDOM

Number of pages

11

Pages from-to

825-835

UT code for WoS article

000303800500010

EID of the result in the Scopus database

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