Determination of the thickness of polycrystalline thin films by using X-ray methods

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F15%3A10311936" target="_blank" >RIV/00216208:11320/15:10311936 - isvavai.cz</a>
Alternative codes found
RIV/61989100:27710/15:86095574
Result on the web
<a href="http://dx.doi.org/10.1016/j.tsf.2015.03.016" target="_blank" >http://dx.doi.org/10.1016/j.tsf.2015.03.016</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.tsf.2015.03.016" target="_blank" >10.1016/j.tsf.2015.03.016</a>

Result language
angličtina
Original language name
Determination of the thickness of polycrystalline thin films by using X-ray methods
Original language description
The knowledge of the thickness of thin layer on substrate is quite important, sometimes even critical, for analysis of the layer properties and behavior. Among a large number of methods the X-ray methods are non-destructive and can simultaneously provideinformation about the structure and microstructure of the layer. These methods are capable to resolve the thickness of the layer within the range 5-300 nm for in-house diffractometers. The method of the first choice is usually the X-ray reflectivity. Inthe case of reflection of X-rays the most limiting factor is the roughness of the interfaces, i.e. the layer and substrate and the thickness inhomogeneity. If the roughness increases certain value the intensity of the specularly reflected intensity drops down very suddenly and the thickness of the layer couldn't be decided. In that case one can use X-ray powder diffraction in very asymmetric geometry, for example in the coplanar grazing-exit parallel beam setup. In this setup the thickn
Czech name
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Czech description
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Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
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Project
<a href="/en/project/GA14-23274S" target="_blank" >GA14-23274S: Unconventional preparation of nanostructured metal oxides by using pressurized and supercritical fluids</a><br>
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2015
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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