Diagnostics of He+N2+CO2 Plasmas in Non-segmented Cylindrical Cathode Magnetron by DC Supply

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F22%3A10457031" target="_blank" >RIV/00216208:11320/22:10457031 - isvavai.cz</a>
Result on the web
<a href="https://www.mff.cuni.cz/veda/konference/wds/proc/pdf22/WDS22_12_f2_Mishra.pdf" target="_blank" >https://www.mff.cuni.cz/veda/konference/wds/proc/pdf22/WDS22_12_f2_Mishra.pdf</a>
DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Diagnostics of He+N2+CO2 Plasmas in Non-segmented Cylindrical Cathode Magnetron by DC Supply
Original language description
We measured plasma parameters (excitation temperature, electron density, rotational and vibrational temperature) in non-segmented cylindrical cathode magnetron by optical emission spectroscopy (OES). Admixture of He+N2+CO2 gases in ratios of 3:2:1 is deployed for plasma study by means of OES diagnostics in a regime of the magnetic field. The objective of study is to understand effect of the gas mixture He+N2+CO2 on plasma parameters. The rotational temperature (Trot), vibrational temperature (Tvib), and electron density (ne) were calculated using spectral lines which were obtained through OES. This work also aims to investigate the validity of the excitation temperature (Texc) by OES as an alternative to the electron temperature (Te). The whole results of emission spectroscopy in a mixture of He+N2+CO2 are analyzed by changing magnetic field (in Tesla), current (in mA), pressure (Pa), keeping flow rate (sccm) constant.
Czech name
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Czech description
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Project
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Continuities
S - Specificky vyzkum na vysokych skolach<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2022
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
WDS'22 Proceedings of Contributed Papers — Physics
ISBN
978-80-7378-477-5
ISSN
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e-ISSN
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Number of pages
8
Pages from-to
89-96
Publisher name
Matfyzpress
Place of publication
Praha
Event location
Praha
Event date
Jun 7, 2022
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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