Parylene-bonded micro-fluidic channels for cryogenic experiments at superfluid He-4 temperatures
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F24%3A10494308" target="_blank" >RIV/00216208:11320/24:10494308 - isvavai.cz</a>
Alternative codes found
RIV/00216305:26220/24:PU151050
Result on the web
<a href="https://verso.is.cuni.cz/pub/verso.fpl?fname=obd_publikace_handle&handle=r6uZlWcfN-" target="_blank" >https://verso.is.cuni.cz/pub/verso.fpl?fname=obd_publikace_handle&handle=r6uZlWcfN-</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1063/5.0162532" target="_blank" >10.1063/5.0162532</a>
Alternative languages
Result language
angličtina
Original language name
Parylene-bonded micro-fluidic channels for cryogenic experiments at superfluid He-4 temperatures
Original language description
We present the manufacturing process of a (24.5 x 100) mu m(2)-sized on-chip flow channel intended for flow experiments with normal and superfluid phases of He-4 and showcase such a proof-of-concept experiment. This work proves the suitability of chip-to-chip bonding using a thin layer of Parylene-C for cryogenic temperatures as a simpler alternative to other techniques, such as anodic bonding. A monocrystalline silicon chip embeds the etched meander-shaped micro-fluidic channel and a deposited platinum heater and is bonded to a Pyrex glass top. We test the leak tightness of the proposed bonding method for superfluid He-4, reaching temperatures of approximate to 1.6 K and evaluate its possible effects on flow experiments. We demonstrate that powering an on-chip platinum heater affects the superfluid flow rate by local overheating of a section of the micro-fluidic channel.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10302 - Condensed matter physics (including formerly solid state physics, supercond.)
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2024
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Review of Scientific Instruments
ISSN
0034-6748
e-ISSN
1089-7623
Volume of the periodical
95
Issue of the periodical within the volume
3
Country of publishing house
US - UNITED STATES
Number of pages
7
Pages from-to
033901
UT code for WoS article
001178860900006
EID of the result in the Scopus database
2-s2.0-85186373178