Angular and Velocity Distributions of Electrons Passing through the Sheath to Planar Substrate in Chemically Active Plasma

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F99%3A11105313" target="_blank" >RIV/00216208:11320/99:11105313 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Angular and Velocity Distributions of Electrons Passing through the Sheath to Planar Substrate in Chemically Active Plasma

Original language description

Angular and Velocity Distributions of Electrons Passing through the Sheath to Planar Substrate in Chemically Active Plasma

Czech name

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Czech description

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Type

D - Article in proceedings

CEP classification

BL - Plasma physics and discharge through gases

OECD FORD branch

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Project

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Continuities

Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

1999

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection

Proc.12th Symposium on Application of Plasma Processes

ISBN

80-223-1370-X

ISSN

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e-ISSN

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Number of pages

2

Pages from-to

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Publisher name

Komensky University, Bratislava

Place of publication

Liptovský Ján

Event location

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Event date

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Type of event by nationality

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UT code for WoS article

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