Temperature dependence of mechanical properties of DLC/Si protective coatings prepared by PECVD

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F02%3A00005633" target="_blank" >RIV/00216224:14310/02:00005633 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Temperature dependence of mechanical properties of DLC/Si protective coatings prepared by PECVD

Original language description

The mechanical properties of hard protective DLC/Si films deposited by PECVD from Ar-CH4-HMDSO mixture have been analyzed using microindentation techniques as the main characterisation tool. The formation and development of crack lines and patterns havebeen studied to determine fracture toughness of the film and of the interface as a function of temperature.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BL - Plasma physics and discharge through gases

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2002

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Materials Science and Engineering

ISSN

0921-5093

e-ISSN

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Volume of the periodical

2002

Issue of the periodical within the volume

A324

Country of publishing house

IE - IRELAND

Number of pages

4

Pages from-to

251

UT code for WoS article

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EID of the result in the Scopus database

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