Film deposition in Parallel Plate RF Discharges Containing Hydrocarbons
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F03%3A00008476" target="_blank" >RIV/00216224:14310/03:00008476 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Film deposition in Parallel Plate RF Discharges Containing Hydrocarbons
Original language description
Film deposition in Paralle Plate RF Discharges Containing Hydrocarbons
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
<a href="/en/project/GP202%2F01%2FP106" target="_blank" >GP202/01/P106: Study of plasmachemical processes using microwave and optical spectroscopy</a><br>
Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2003
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Proceedings of ISPC 14
ISBN
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ISSN
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e-ISSN
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Number of pages
4
Pages from-to
806
Publisher name
Universita di Bari
Place of publication
Taormina
Event location
Taormina
Event date
Jan 1, 2003
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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