Study of Mechanical Properties of Nanostructured Multilayer NbN/C-N Coatings Prepared by Reactive Sputtering

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F03%3A00009105" target="_blank" >RIV/00216224:14310/03:00009105 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Study of Mechanical Properties of Nanostructured Multilayer NbN/C-N Coatings Prepared by Reactive Sputtering

Original language description

A complex analysis of the identation response of thin film - substrate systems measured by depth sensing indentation method was done. The effects of the mechanical properties of the substrate on the effective hardness were studied for several different substrates and the existing theoretial models for substrate influance were tested.

Czech name

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Czech description

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Type

D - Article in proceedings

CEP classification

BL - Plasma physics and discharge through gases

OECD FORD branch

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Project

<a href="/en/project/OC%20527.20" target="_blank" >OC 527.20: Plasmachemical depositions and plasmachemical treatment of surfaces of solid state substrate</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2003

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection

Proceedings of SAPP XIV

ISBN

80-8040-195-0

ISSN

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e-ISSN

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Number of pages

2

Pages from-to

199-200

Publisher name

Pavol Šutta, Jarmila Mullerová, and Róbert Mikuláš

Place of publication

Bratislava, Slovak republic

Event location

Bobrovník, Slovak republic

Event date

Jan 13, 2003

Type of event by nationality

WRD - Celosvětová akce

UT code for WoS article

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