Reduction of tungsten precursors in inductive rf discharge plasma reactors

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F03%3A00009448" target="_blank" >RIV/00216224:14310/03:00009448 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Reduction of tungsten precursors in inductive rf discharge plasma reactors

Original language description

Ammonium paratungstate (APT) was reduced in inductively coupled h.f. plasma reactor(4 MHz,2 kW). As working gas was used hydrogen. If the mixture of hydrogen with hydrocarbon is used (methane, propan butane)it is possible to prepare also tungsten carbidein the ratio up to WC/W=80/20.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BL - Plasma physics and discharge through gases

OECD FORD branch

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Project

<a href="/en/project/OC%20527.20" target="_blank" >OC 527.20: Plasmachemical depositions and plasmachemical treatment of surfaces of solid state substrate</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2003

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

High Temperature Material Processes

ISSN

1093-3611

e-ISSN

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Volume of the periodical

7/2003

Issue of the periodical within the volume

3

Country of publishing house

US - UNITED STATES

Number of pages

10

Pages from-to

357-366

UT code for WoS article

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EID of the result in the Scopus database

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