Energy distribution functions of ions impinging on substrate in microwave plasma
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F04%3A00010375" target="_blank" >RIV/00216224:14310/04:00010375 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Energy distribution functions of ions impinging on substrate in microwave plasma
Original language description
Energy distribution functions of ions impinging on substrate in microwave plasma
Czech name
Rozdelovaci funkce iontu dopadajicich na substart v mikrovlnnem plazmatu
Czech description
Rozdelovaci funkce iontu dopadajicich na substart v mikrovlnnem plazmatu
Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
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Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2004
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Journal of physics D: Applied physics
ISSN
0022-3727
e-ISSN
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Volume of the periodical
37
Issue of the periodical within the volume
3
Country of publishing house
GB - UNITED KINGDOM
Number of pages
7
Pages from-to
438-444
UT code for WoS article
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EID of the result in the Scopus database
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