All

What are you looking for?

All
Projects
Results
Organizations

Quick search

  • Projects supported by TA ČR
  • Excellent projects
  • Projects with the highest public support
  • Current projects

Smart search

  • That is how I find a specific +word
  • That is how I leave the -word out of the results
  • “That is how I can find the whole phrase”

Depth profile studies of ZrTiN coatings by laser ablation inductively coupled plasma mass spectrometry

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F04%3A00011020" target="_blank" >RIV/00216224:14310/04:00011020 - isvavai.cz</a>

  • Result on the web

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    angličtina

  • Original language name

    Depth profile studies of ZrTiN coatings by laser ablation inductively coupled plasma mass spectrometry

  • Original language description

    Abstract Feasibility of depth profiling was studied using a 193 nm ArF* excimer laser ablation system (GeoLas, MicroLas, Goettingen, Germany) with the lens-array-based beam homogenizer in combination with ICP-QMS Agilent 7500. Two ablation cells (20 cm3and 1.5 cm3) were compared at the laser repetition rate of 1Hz, laser beam energy of 135 mJ and the carrier gas flow rate 1.5 L/min He + 0.78 L/min Ar. Dimensions of ablation cell are important parameters for signal tailing, however; very small cell volumes (e.g. 1.5 cm3) may cause memory effects, which can be probably explained by dominant inertial losses of aerosol on cell walls with its delayed mobilization. The 20-cm3-ablation cell seems to be appropriate for depth profiling by continuous single-hole drilling. The study of influence of the pit diameter magnitude on courses of waning and emerging signals under small crater depth/diameter aspect ratio, which ranges between 0.75 and 0.0375 for the 3-ěm thick coatings and pit diameters

  • Czech name

    Studium hloubkovch profil plazmov deponovanch povlak ZrTiN pomoc laserov ablace s hmotnostn spektrometri v indukn vzanm plazmatu

  • Czech description

    Abstract Feasibility of depth profiling was studied using a 193 nm ArF* excimer laser ablation system (GeoLas, MicroLas, Goettingen, Germany) with the lens-array-based beam homogenizer in combination with ICP-QMS Agilent 7500. Two ablation cells (20 cm3and 1.5 cm3) were compared at the laser repetition rate of 1Hz, laser beam energy of 135 mJ and the carrier gas flow rate 1.5 L/min He + 0.78 L/min Ar. Dimensions of ablation cell are important parameters for signal tailing, however; very small cell volumes (e.g. 1.5 cm3) may cause memory effects, which can be probably explained by dominant inertial losses of aerosol on cell walls with its delayed mobilization. The 20-cm3-ablation cell seems to be appropriate for depth profiling by continuous single-hole drilling. The study of influence of the pit diameter magnitude on courses of waning and emerging signals under small crater depth/diameter aspect ratio, which ranges between 0.75 and 0.0375 for the 3-ěm thick coatings and pit diameters

Classification

  • Type

    J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

  • CEP classification

    CB - Analytical chemistry, separation

  • OECD FORD branch

Result continuities

  • Project

  • Continuities

    Z - Vyzkumny zamer (s odkazem do CEZ)

Others

  • Publication year

    2004

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Analytical and Bioanalytical Chemistry

  • ISSN

    1618-2642

  • e-ISSN

  • Volume of the periodical

    380

  • Issue of the periodical within the volume

    2

  • Country of publishing house

    DE - GERMANY

  • Number of pages

    9

  • Pages from-to

    218-226

  • UT code for WoS article

  • EID of the result in the Scopus database