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Complex study of the mechanical properties of a-Si:H and a-SiC:H thin films

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F05%3A00012628" target="_blank" >RIV/00216224:14310/05:00012628 - isvavai.cz</a>

  • Alternative codes found

    RIV/68081723:_____/05:00024071

  • Result on the web

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    angličtina

  • Original language name

    Complex study of the mechanical properties of a-Si:H and a-SiC:H thin films

  • Original language description

    The aim of this study is to provide the complex study of the mechanical properties of a-SiH and a-SiC:H thin films prepared under different plasma conditions.

  • Czech name

    Komplexní studium mechanických vlastností tenkých vrstev a-Si:H , a-SiC:H

  • Czech description

    Cílem práce je komplexní studium mechanických vlastností tenkých vrstev a-Si:H a a-SiC:H připravených v plazmatu za různých depozičních podmínek.

Classification

  • Type

    D - Article in proceedings

  • CEP classification

    BM - Solid-state physics and magnetism

  • OECD FORD branch

Result continuities

  • Project

    <a href="/en/project/GA106%2F05%2F0274" target="_blank" >GA106/05/0274: Multiscale approach to relationships between mechanical and microstructural characteristics of materials</a><br>

  • Continuities

    Z - Vyzkumny zamer (s odkazem do CEZ)

Others

  • Publication year

    2005

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Article name in the collection

    Book of abstract - ICANS 21

  • ISBN

    972-8893-04-3

  • ISSN

  • e-ISSN

  • Number of pages

    1

  • Pages from-to

    162

  • Publisher name

    Universidade Nova de Lisboa

  • Place of publication

    Lisbon

  • Event location

    Lisabon

  • Event date

    Sep 3, 2005

  • Type of event by nationality

    WRD - Celosvětová akce

  • UT code for WoS article