Determination of electron temperature in neon RF discharge by means of collisional-radiative model
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F07%3A00020430" target="_blank" >RIV/00216224:14310/07:00020430 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Determination of electron temperature in neon RF discharge by means of collisional-radiative model
Original language description
A collisional-radiative model was used to determine the electron temperature in capacitively coupled RF (13.56 MHz) discharge in neon. Two discharge regimes at different pressures were investigated. The temperature was determined from the fit of the theoretical spectra to the spectra measured by optical emission spectroscopy. Three kinds of electron distribution function - Maxwellian, Bi-Maxwellian and Pseudo-Bi-Maxwellian - were considered. The results were compared with Particle-in-Cell/ Monte-Carlo simulation. The comparison of the fitted calculated and measured spectra shows a good agreement between the theory and experiment. The electron temperature, which was estimated from the fits, was approx. 6 eV in the sheath at neon pressure of 10 Pa and approx. 2 eV in the bulk plasma at neon pressure of 80 Pa.
Czech name
Stanovení teploty elektronů v RF výboji v neonu pomocí srážkově-radiačního modelu
Czech description
Teplota elektronů v kapacitně vázaném RF výboji v neonu byla stanovena pomocí srážkověradiačního modelu. Byly zkoumány dva režimy výboje při různých tlacích (10 a 80 Pa). Byly uvažovány tři druhy rozdělovací funkce elektronů. Výsledky byly porovnány se simulací PIC/MC.
Classification
Type
D - Article in proceedings
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2007
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Proceedings of ICPIG XXVIII
ISBN
978-80-87026-01-4
ISSN
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e-ISSN
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Number of pages
3
Pages from-to
1618-1620
Publisher name
Institute of Plasma Physics AS CR
Place of publication
Praha
Event location
Praha
Event date
Jul 15, 2007
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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