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Selective wet etching of amorphous/crystallized Ag/As/S and Ag/As/S/Se chalcogenide thin films

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F07%3A00028406" target="_blank" >RIV/00216224:14310/07:00028406 - isvavai.cz</a>

  • Alternative codes found

    RIV/00177016:_____/07:#0000336

  • Result on the web

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    angličtina

  • Original language name

    Selective wet etching of amorphous/crystallized Ag/As/S and Ag/As/S/Se chalcogenide thin films

  • Original language description

    The paper is focused on the possibilities of selective wet etching of optically and thermally crystallized /amorphous Ag-doped chalcogenide thin films, namely Ag-x(As0.33S0.67)(100-x) and Ag-x(As0.33S0.335Se0.335)(100-x). The selective etching of optically(thermally) crystallized Ag-x(As0.33S0.67)(100-x) and thermally crystallized Ag-x(As0.33S0.335Se0.335)(100-x) thin films in water solution of NaCN is presented. The good surface quality is an important and crucial parameter for optical elements fabrication (e.g. grids, waveguides, etc.) especially in nanometer dimensions. The selective etching of undoped and Ag optically doped region was also carried out to observe surface roughness of doped region before and after selective etching. Characterizationof the structure and surface of studied films by Raman spectroscopy, X-ray diffraction, AFM and SEM methods has been done and potential application suggested.

  • Czech name

  • Czech description

Classification

  • Type

    J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

  • CEP classification

    CA - Inorganic chemistry

  • OECD FORD branch

Result continuities

  • Project

    <a href="/en/project/GA203%2F06%2F1368" target="_blank" >GA203/06/1368: The preparation and study of amorphous chalcogenide films and their potential applications for optical recording and memories</a><br>

  • Continuities

    Z - Vyzkumny zamer (s odkazem do CEZ)

Others

  • Publication year

    2007

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Journal of Physics and Chemistry of Solids

  • ISSN

    0022-3697

  • e-ISSN

  • Volume of the periodical

    68

  • Issue of the periodical within the volume

    5-6

  • Country of publishing house

    CZ - CZECH REPUBLIC

  • Number of pages

    6

  • Pages from-to

  • UT code for WoS article

  • EID of the result in the Scopus database