Selective wet etching of amorphous/crystallized Ag/As/S and Ag/As/S/Se chalcogenide thin films
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F07%3A00028406" target="_blank" >RIV/00216224:14310/07:00028406 - isvavai.cz</a>
Alternative codes found
RIV/00177016:_____/07:#0000336
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Selective wet etching of amorphous/crystallized Ag/As/S and Ag/As/S/Se chalcogenide thin films
Original language description
The paper is focused on the possibilities of selective wet etching of optically and thermally crystallized /amorphous Ag-doped chalcogenide thin films, namely Ag-x(As0.33S0.67)(100-x) and Ag-x(As0.33S0.335Se0.335)(100-x). The selective etching of optically(thermally) crystallized Ag-x(As0.33S0.67)(100-x) and thermally crystallized Ag-x(As0.33S0.335Se0.335)(100-x) thin films in water solution of NaCN is presented. The good surface quality is an important and crucial parameter for optical elements fabrication (e.g. grids, waveguides, etc.) especially in nanometer dimensions. The selective etching of undoped and Ag optically doped region was also carried out to observe surface roughness of doped region before and after selective etching. Characterizationof the structure and surface of studied films by Raman spectroscopy, X-ray diffraction, AFM and SEM methods has been done and potential application suggested.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
CA - Inorganic chemistry
OECD FORD branch
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Result continuities
Project
<a href="/en/project/GA203%2F06%2F1368" target="_blank" >GA203/06/1368: The preparation and study of amorphous chalcogenide films and their potential applications for optical recording and memories</a><br>
Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2007
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Journal of Physics and Chemistry of Solids
ISSN
0022-3697
e-ISSN
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Volume of the periodical
68
Issue of the periodical within the volume
5-6
Country of publishing house
CZ - CZECH REPUBLIC
Number of pages
6
Pages from-to
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UT code for WoS article
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EID of the result in the Scopus database
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