Investigation of Neon RF Discharge by Means of Refined Collisional-Radiative model

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F08%3A00025162" target="_blank" >RIV/00216224:14310/08:00025162 - isvavai.cz</a>
Result on the web
—
DOI - Digital Object Identifier
—

Result language
angličtina
Original language name
Investigation of Neon RF Discharge by Means of Refined Collisional-Radiative model
Original language description
A recently developed collisional-radiative (c-r) model for neon discharge was used to investigate the plasma properties of a capacitively coupled RF (13.56 MHz) discharge in neon. By means of c-r model, population of thirty excited states of neon atom and therefore optical emission spectrum for a given electron distribution function was determined. The discharge was studied by optical emission spectroscopy. By comparison of measured and calculated optical emission spectra on the basis of least-squares method the electron temperature or electron density was determined. The developed collisional-radiative model was refined in order to describe the studied plasma more correctly. Some important processes (as e.g. excitation transfer between 3s levels of neon atom induced by electron impact), were newly incorporated in the presented calculations. A 1/y-weighted sum of squares was used in the comparison of the spectra. Moreover, the model was modified in order to determine the emission coeff
Czech name
Studium RF výboje v neonu pomocí srážkově-radiačního modelu
Czech description
Dříve vyvinutý srážkově-radiační model byl použit ke studiu kapacitně vázaného RF výboje (13,56 MHz) v neonu. Spolu s absolutním měření intenzity záření bylo možné stanovit teplotu a koncentraci elektronů.

Project
<a href="/en/project/GA202%2F06%2F0776" target="_blank" >GA202/06/0776: Advanced research and development of low-temperature plasma sources</a><br>
Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year
2008
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Programme & Abstract Book of 23rd Symposium on Plasma Physics and Technology, Prague, Czech Republic, 13.-19.June 2008
ISBN
978-80-01-04030-0
ISSN
—
e-ISSN
—
Number of pages
1
Pages from-to
—
Publisher name
ČVUT v Praze, Organizační výbor sympozia
Place of publication
Praha
Event location
Praha
Event date
Jun 16, 2008
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
—

Similar results(10)