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Higher harmonic frequencies of discharge voltages as extremely sensitive marker of state of RF reactive sputtering deposition process

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F09%3A00029205" target="_blank" >RIV/00216224:14310/09:00029205 - isvavai.cz</a>

  • Result on the web

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    angličtina

  • Original language name

    Higher harmonic frequencies of discharge voltages as extremely sensitive marker of state of RF reactive sputtering deposition process

  • Original language description

    Higher harmonic frequencies of discharge voltages as extremely sensitive marker of state of RF reactive sputtering deposition process, proceeding

  • Czech name

  • Czech description

Classification

  • Type

    D - Article in proceedings

  • CEP classification

    BL - Plasma physics and discharge through gases

  • OECD FORD branch

Result continuities

  • Project

    <a href="/en/project/GP202%2F08%2FP038" target="_blank" >GP202/08/P038: Study of hybrid deposition process and its application for thin film deposition</a><br>

  • Continuities

    Z - Vyzkumny zamer (s odkazem do CEZ)

Others

  • Publication year

    2009

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Article name in the collection

    Book of Contributed Papers of 17th Symposium on Applications of Plasma Processes

  • ISBN

    978-80-89186-45-7

  • ISSN

  • e-ISSN

  • Number of pages

    1

  • Pages from-to

  • Publisher name

    Comenius University in Bratislava

  • Place of publication

    Bratislava

  • Event location

    Liptovský ján

  • Event date

    Jan 17, 2009

  • Type of event by nationality

    WRD - Celosvětová akce

  • UT code for WoS article