Deposition and characterization of nc-TiC/a-C:H coatings prepared by hybrid PVD-PECVD

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F10%3A00044661" target="_blank" >RIV/00216224:14310/10:00044661 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Deposition and characterization of nc-TiC/a-C:H coatings prepared by hybrid PVD-PECVD

Original language description

Several micrometers thick nc-TiC/a-C:H films were prepared by sputtering of the Ti target in a mixture of argon and acetylene gases. Polished steel substrates were used to come close to industrial conditions of usage of such films. The initial temperature of the steel substrates was found to have a significant impact on the quality of the deposited nc-TiC/a-C:H films.

Czech name

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Czech description

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Type

D - Article in proceedings

CEP classification

BL - Plasma physics and discharge through gases

OECD FORD branch

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Project

<a href="/en/project/GP202%2F08%2FP038" target="_blank" >GP202/08/P038: Study of hybrid deposition process and its application for thin film deposition</a><br>

Continuities

Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2010

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection

Potencial and Application of Nanotreatment of Medical Surfaces

ISBN

978-80-7372-631-7

ISSN

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e-ISSN

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Number of pages

2

Pages from-to

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Publisher name

Technical University of Liberec

Place of publication

Liberec

Event location

Liberec

Event date

Aug 30, 2010

Type of event by nationality

EUR - Evropská akce

UT code for WoS article

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