Development of reference materials for the investigation of local mechanical properties at the nanoscale

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F12%3A00057088" target="_blank" >RIV/00216224:14310/12:00057088 - isvavai.cz</a>
Result on the web
<a href="http://onlinelibrary.wiley.com/doi/10.1002/sia.4850/pdf" target="_blank" >http://onlinelibrary.wiley.com/doi/10.1002/sia.4850/pdf</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1002/sia.4850" target="_blank" >10.1002/sia.4850</a>

Result language
angličtina
Original language name
Development of reference materials for the investigation of local mechanical properties at the nanoscale
Original language description
In this contribution, we present the results of our effort on preparing and testing thin film?based reference materials prepared using plasma technologies. We describe a deposition procedure that allows us to produce samples with a large range of hardness and modulus values. From these, we choose a very soft but stable sample that is then further tested to verify its suitability as a reference sample. The major issues discussed in this article are the repeatability of the deposition process, time stability, and homogeneity.
Czech name
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Czech description
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Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>S - Specificky vyzkum na vysokych skolach

Publication year
2012
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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