Langmuir Probe and Optical Emission Diagnostics of DC Cylindrical Magnetron

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F12%3A00057404" target="_blank" >RIV/00216224:14310/12:00057404 - isvavai.cz</a>
Result on the web
—
DOI - Digital Object Identifier
—

Result language
angličtina
Original language name
Langmuir Probe and Optical Emission Diagnostics of DC Cylindrical Magnetron
Original language description
In this paper we present study of the dc discharge in the cylindrical magnetron device. The working gas was neon, the typical working pressure range was of 2-10 Pa and discharge current was set up in the range of 100-250 mA. Measurements were performed in the neon weakly magnetized dc plasma using the radial movable cylindrical Langmuire probe. From probe characteristics, radial dependences of plasma parameters (plasma potential, floating potential, electron density) were obtained. Optical emission spectroscopy accompanied with a method of effective branching fractions (EBF) was used to determine neon 1s3 and 1s5 metastable state densities from transitions 2p5 3p - 2p5 3s. The determined density of 1s5 metastable state was 2.2x10^10 cm-3.
Czech name
—
Czech description
—

Project
<a href="/en/project/GD104%2F09%2FH080" target="_blank" >GD104/09/H080: Plasmachemical processes and their technological applications</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>S - Specificky vyzkum na vysokych skolach<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2012
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Similar results(10)