Experimental study of DC driven hybrid PVD-PECVD process
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F12%3A00057670" target="_blank" >RIV/00216224:14310/12:00057670 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Experimental study of DC driven hybrid PVD-PECVD process
Original language description
Evolution of basic deposition plasma parameters such as discharge voltage and current, total pressure and selected spectral emission line intensities as a function of acetylene supply flow is reported and correlated with the evolution of the state of thetarget.
Czech name
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Czech description
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Classification
Type
O - Miscellaneous
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2012
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů