Optical emission spectroscopy of RF plasma jet in neon/argon Penning mixture at atmospheric pressure
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F14%3A00076036" target="_blank" >RIV/00216224:14310/14:00076036 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Optical emission spectroscopy of RF plasma jet in neon/argon Penning mixture at atmospheric pressure
Original language description
A radio-frequency (RF, 27.12 MHz) capillary atmospheric pressure plasma jet in neon/argon Penning gas mixture (0 % - 3 % admixture of argon) was investigated by optical emission spectroscopy. The miniaturized plasma jets have been found advantageous in amaterials processing applications such as surface cleaning, surface activation, film deposition and sterilisation. One of the main advantages of these plasma sources is the possibility of localized and 3D treatment. In this work, the emission spectra were recorded in order to obtain information about the effect of quenching of neon excited atoms by argon with the increase of argon admixture. Further, the BOLSIG+ solver was used to calculate the electron mean energy and the rate coefficients for directexcitation of neon and argon levels for different Ne/Ar gas mixtures. The estimate of the reduced electric field strength according to these results was made.
Czech name
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Czech description
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Classification
Type
O - Miscellaneous
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2014
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů