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Optical emission spectroscopy of RF plasma jet in neon/argon Penning mixture at atmospheric pressure

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F14%3A00076036" target="_blank" >RIV/00216224:14310/14:00076036 - isvavai.cz</a>

  • Result on the web

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    angličtina

  • Original language name

    Optical emission spectroscopy of RF plasma jet in neon/argon Penning mixture at atmospheric pressure

  • Original language description

    A radio-frequency (RF, 27.12 MHz) capillary atmospheric pressure plasma jet in neon/argon Penning gas mixture (0 % - 3 % admixture of argon) was investigated by optical emission spectroscopy. The miniaturized plasma jets have been found advantageous in amaterials processing applications such as surface cleaning, surface activation, film deposition and sterilisation. One of the main advantages of these plasma sources is the possibility of localized and 3D treatment. In this work, the emission spectra were recorded in order to obtain information about the effect of quenching of neon excited atoms by argon with the increase of argon admixture. Further, the BOLSIG+ solver was used to calculate the electron mean energy and the rate coefficients for directexcitation of neon and argon levels for different Ne/Ar gas mixtures. The estimate of the reduced electric field strength according to these results was made.

  • Czech name

  • Czech description

Classification

  • Type

    O - Miscellaneous

  • CEP classification

    BL - Plasma physics and discharge through gases

  • OECD FORD branch

Result continuities

  • Project

    Result was created during the realization of more than one project. More information in the Projects tab.

  • Continuities

    P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Others

  • Publication year

    2014

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů