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Deposition of Zn-containing films using atmospheric pressure plasma jet

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F14%3A00079196" target="_blank" >RIV/00216224:14310/14:00079196 - isvavai.cz</a>

  • Result on the web

    <a href="http://dx.doi.org/10.1515/chem-2015-0020" target="_blank" >http://dx.doi.org/10.1515/chem-2015-0020</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.1515/chem-2015-0020" target="_blank" >10.1515/chem-2015-0020</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Deposition of Zn-containing films using atmospheric pressure plasma jet

  • Original language description

    The aim of this work was to deposit Zn-containing films on Si substrates using the commercial atmospheric pressure plasma jet ?kINPen?09?. In preliminary experiments Zn-containing films were deposited on the substrates immersed in water solutions of Zn(NO3)2.6H2O salt. The surface composition of deposited films was analyzed by XPS (X-ray photoelectron spectroscopy) technique while the bulk composition was studied by means of XRD (X-ray diffraction) mesurements. The film thickness was measured by a profilometer. We have found out, that the concentration of the zinc nitrate solution as well as changes in the deposition time result in a large fluctuation of the deposited film thickness. However, the successful deposition of the Zn-containing films on theSi substrate was definitely confirmed

  • Czech name

  • Czech description

Classification

  • Type

    J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

  • CEP classification

    BL - Plasma physics and discharge through gases

  • OECD FORD branch

Result continuities

  • Project

    Result was created during the realization of more than one project. More information in the Projects tab.

  • Continuities

    P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Others

  • Publication year

    2014

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Open chemistry

  • ISSN

    2391-5420

  • e-ISSN

  • Volume of the periodical

    13/2014

  • Issue of the periodical within the volume

    13(1)

  • Country of publishing house

    DE - GERMANY

  • Number of pages

    6

  • Pages from-to

    198-203

  • UT code for WoS article

  • EID of the result in the Scopus database