Deposition of Zn-containing films using atmospheric pressure plasma jet

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F14%3A00079196" target="_blank" >RIV/00216224:14310/14:00079196 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1515/chem-2015-0020" target="_blank" >http://dx.doi.org/10.1515/chem-2015-0020</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1515/chem-2015-0020" target="_blank" >10.1515/chem-2015-0020</a>

Result language
angličtina
Original language name
Deposition of Zn-containing films using atmospheric pressure plasma jet
Original language description
The aim of this work was to deposit Zn-containing films on Si substrates using the commercial atmospheric pressure plasma jet ?kINPen?09?. In preliminary experiments Zn-containing films were deposited on the substrates immersed in water solutions of Zn(NO3)2.6H2O salt. The surface composition of deposited films was analyzed by XPS (X-ray photoelectron spectroscopy) technique while the bulk composition was studied by means of XRD (X-ray diffraction) mesurements. The film thickness was measured by a profilometer. We have found out, that the concentration of the zinc nitrate solution as well as changes in the deposition time result in a large fluctuation of the deposited film thickness. However, the successful deposition of the Zn-containing films on theSi substrate was definitely confirmed
Czech name
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Czech description
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Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2014
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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