Reactive argon/acetylene HiPIMS discharge ? time-resolved diagnostic of present species
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F15%3A00081051" target="_blank" >RIV/00216224:14310/15:00081051 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Reactive argon/acetylene HiPIMS discharge ? time-resolved diagnostic of present species
Original language description
Temporal evolution of the selected emission line intensities ? H line, atom and ion line of Ti and Ar ? were measured during the 400us HiPIMS pulse for different acetylene flows. Moreover, densities of sputtered titanium atoms and ions in their ground levels were determined using spectroscopic technique based on effective branching fractions. The technique is based on fitting theoretically calculated branching fractions to experimentally measured fractions of the relative intensities of carefully selected lines of the measured species. Dependencies of intensities of selected species and Ti atom and ion densities on discharge current evolution were studied and were compared for selected acetylene flows.
Czech name
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Czech description
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Classification
Type
O - Miscellaneous
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2015
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů