Study of Ni doped nc-TiC/a-C(:H) coatings prepared by hybrid PVD-PECVD process
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F15%3A00081072" target="_blank" >RIV/00216224:14310/15:00081072 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Study of Ni doped nc-TiC/a-C(:H) coatings prepared by hybrid PVD-PECVD process
Original language description
Nanocomposite thin films, such as nanocrystalline titanium carbide embedded in an amorphous carbon matrix, nc-TiC/a-C(:H), are widely studied due their mechanical properties such as high hardness [1]. One of the main parameter which determines mechanicalproperties of nc-TiC/a-C(:H) coating system is the relative content of nanocrystalline and amorphous phases. A possible tool for influencing this parameter is selective doping of this system by a non-carbide forming element such as nickel, proposed by Lewin [2]. Hybrid PVD-PECVD process of sputtering titanium target in mixture of acetylene and argon was used to deposit superhard nc-TiC/a-C(:H) coatings [3]. For nickel doping of these coatings titanium-nickel (92.5 % Ti, 7.5 % Ni) target was used instead of pure titanium one. A sets of nickel free nc-TiC/a-C(:H) and Ni-dopped nc-TiC/a-C(:H) coatings were prepared and compared. For the determination of the influence of nickel doping several different analyses were used.
Czech name
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Czech description
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Classification
Type
O - Miscellaneous
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2015
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů