Titanium Atom and Ion Number Density Evolution in Reactive HiPIMS

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F17%3A00095257" target="_blank" >RIV/00216224:14310/17:00095257 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Titanium Atom and Ion Number Density Evolution in Reactive HiPIMS
Original language description
The shape of the hysteresis curve in R-HiPIMS was noticeable different from that one of dc magnetron sputtering operation at the same mean power – the transition from the metallic to compound mode and vice versa were shifted to lower reactive gas supply and the width of the hysteresis curve was reduced. These changes were more pronounced for R-HiPIMS processes with higher ionized fraction of the sputtered species. The modified Berg model assuming that a part of the sputtered and ionized species are back-attracted to the target was developed.
Czech name
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Czech description
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>S - Specificky vyzkum na vysokych skolach<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2017
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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