Time-resolved sputtered species number density in Ar/N2 HiPIMS
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F21%3A00119557" target="_blank" >RIV/00216224:14310/21:00119557 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Time-resolved sputtered species number density in Ar/N2 HiPIMS
Original language description
The online presentation described the temporal evolution of sputtered titanium atoms and titanium ions ground state densities in the target and substrate region, for four different nitrogen gas flow, and for two differently powered pulses.
Czech name
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Czech description
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Classification
Type
O - Miscellaneous
CEP classification
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OECD FORD branch
10303 - Particles and field physics
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2021
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů