Predicting the composition of W-B-C coatings sputtered from industrial cylindrical segmented target
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F22%3A00125689" target="_blank" >RIV/00216224:14310/22:00125689 - isvavai.cz</a>
Result on the web
<a href="https://www.sciencedirect.com/science/article/pii/S0257897222003322" target="_blank" >https://www.sciencedirect.com/science/article/pii/S0257897222003322</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.surfcoat.2022.128411" target="_blank" >10.1016/j.surfcoat.2022.128411</a>
Alternative languages
Result language
angličtina
Original language name
Predicting the composition of W-B-C coatings sputtered from industrial cylindrical segmented target
Original language description
Computational methods have been gaining more and more attention as they provide a powerful tool for increasing efficiency in the industrial use of magnetron sputtering and provide results from which experimental work benefits. This work presents an approach for the prediction of the composition and the deposition rate of the coatings. The combination of SDTrimSP and SiMTra provides a framework for the simulation of the deposition process. The chemical composition and the deposition rate of industrially sputtered W-B-C coatings were investigated. An industrial batch coater with a complex geometry was modelled. A cylindrical rotating sputter source was mounted with a segmented target composed of W, B4C, and C segments. The simulated chemical composition and the relative deposition rate were verified and validated by experiments. A correlation between the chemical composition and target segment placement is presented, and the influence of substrate movement on the chemical composition is discussed. A single-axis rotation of the substrate placed on an industrial carousel causes a lowering of the content of tungsten in the coatings in comparison to statically placed substrates in front of the sputter source. The simulations uncover the distinct trajectories of the heavy and light particles. The different transport of particles from target to substrate results in the observed shift of chemical composition and also explains the inherent nanolayering of the non-reactively deposited coatings in the industrial batch coater.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10305 - Fluids and plasma physics (including surface physics)
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2022
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Surface and Coatings Technology
ISSN
0257-8972
e-ISSN
1879-3347
Volume of the periodical
438
Issue of the periodical within the volume
May
Country of publishing house
CH - SWITZERLAND
Number of pages
10
Pages from-to
1-10
UT code for WoS article
000793053500002
EID of the result in the Scopus database
2-s2.0-85127830480