Synthesis and characterization of the ceramic refractory metal high entropy nitride thin films from Cr-Hf-Mo-Ta-W system

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F22%3A00127020" target="_blank" >RIV/00216224:14310/22:00127020 - isvavai.cz</a>

Result on the web

<a href="https://www.sciencedirect.com/science/article/pii/S0257897222009082?dgcid=coauthor#" target="_blank" >https://www.sciencedirect.com/science/article/pii/S0257897222009082?dgcid=coauthor#</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.surfcoat.2022.128987" target="_blank" >10.1016/j.surfcoat.2022.128987</a>

Result language

angličtina

Original language name

Synthesis and characterization of the ceramic refractory metal high entropy nitride thin films from Cr-Hf-Mo-Ta-W system

Original language description

High entropy alloy and nitride coatings from the Cr-Hf-Mo-Ta-W system were deposited by reactive magnetron sputtering from elemental segmented targets. The study aimed to investigate the effects of deposition parameters on the microstructure and mechanical properties of this novel multicomponent material. Samples without nitrogen flow and under different nitrogen flows were prepared in two series of samples prepared at ambient temperature and at 750 °C. The proportion of metallic elements varied with increasing nitrogen flow. The nitrogen content revealed saturation below 50 % under high flow. The thin films showed a different microstructure depending on the deposition conditions, from a single nanocrystalline bcc phase (a = 3.174 Å) in the metallic sample prepared at 750 °C without nitrogen flow, through an amorphous structure under low nitrogen flow to a major nanocrystalline NaCl-type fcc nitride phase (a = 4.186–4.268 Å, in agreement with the ab-initio predicted values) in samples deposited under high nitrogen flow. The cross-section morphology of the amorphous sample was very homogeneous, while the samples with a major fcc nitride phase showed a typical columnar morphology. Overall, the films revealed hardness and Young's modulus up to 20.3 GPa and 471 GPa, respectively, for the fcc nitride coating. The experimental values of Young's modulus were in good agreement with the values of directional [100] Young's modulus obtained by ab-initio calculations. The results of our research showed that coatings consisting of bcc and fcc phases could be produced by magnetron sputtering with interesting mechanical properties such as high Young's modulus. Moreover, the results contribute to the understanding of the influence of the nitrogen flow on the microstructural features such as crystallite size, vacancies in the lattice, and lattice parameter change.

Czech name

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Czech description

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Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

—

OECD FORD branch

10305 - Fluids and plasma physics (including surface physics)

Project

<a href="/en/project/LM2018097" target="_blank" >LM2018097: R&D centre for plasma and nanotechnology surface modifications</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2022

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Surface and Coatings Technology

ISSN

0257-8972

e-ISSN

0257-8972

Volume of the periodical

449

Issue of the periodical within the volume

November

Country of publishing house

CH - SWITZERLAND

Number of pages

13

Pages from-to

1-13

UT code for WoS article

000878637300001

EID of the result in the Scopus database

2-s2.0-85140298458