Diagnostics and monitoring of TiN/AlN deposition process
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14330%2F01%3A00005270" target="_blank" >RIV/00216224:14330/01:00005270 - isvavai.cz</a>
Result on the web
—
DOI - Digital Object Identifier
—
Alternative languages
Result language
angličtina
Original language name
Diagnostics and monitoring of TiN/AlN deposition process
Original language description
Diagnostics and monitoring of TiN/AlN deposition process
Czech name
—
Czech description
—
Classification
Type
A - Audiovisual production
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
—
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2001
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
ISBN
—
Place of publication
Brno
Publisher/client name
Pragolab
Version
Spektrometry a vláknová optika
Carrier ID
—