Plasma Deposition of Diamond-Like Protective Coating with Silicon Oxide Content

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14330%2F03%3A00009027" target="_blank" >RIV/00216224:14330/03:00009027 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Plasma Deposition of Diamond-Like Protective Coating with Silicon Oxide Content

Original language description

Amorphous diamond-like carbon films with various silicon and oxygen content were deposited by plasma-enhanced chemical vapor deposition technique. The films were prepared from the mixture of methane and hexamethyldisiloxane in rf capacitively coupled discharges. The optimum SiOx percentage in the DLC network at which the thermo-mechanical stability of the DLC films was improved was determined.

Czech name

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Czech description

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Type

D - Article in proceedings

CEP classification

BL - Plasma physics and discharge through gases

OECD FORD branch

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Project

<a href="/en/project/ME%20489" target="_blank" >ME 489: Study of reactivity of organosilicon monomers in plasma environment</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2003

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection

46th Annual SVC Technical Conference Proceedings

ISBN

0737-5921

ISSN

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e-ISSN

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Number of pages

5

Pages from-to

23-27

Publisher name

Society of Vacuum Coaters (SVC)

Place of publication

San Francisco

Event location

San Francisco

Event date

Jan 1, 2003

Type of event by nationality

WRD - Celosvětová akce

UT code for WoS article

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