Experimental design approach for deposition optimization of RF sputtered chalcogenide thin films devoted to environmental optical sensors
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216275%3A25310%2F17%3A39910654" target="_blank" >RIV/00216275:25310/17:39910654 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1038/s41598-017-03678-w" target="_blank" >http://dx.doi.org/10.1038/s41598-017-03678-w</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1038/s41598-017-03678-w" target="_blank" >10.1038/s41598-017-03678-w</a>
Alternative languages
Result language
angličtina
Original language name
Experimental design approach for deposition optimization of RF sputtered chalcogenide thin films devoted to environmental optical sensors
Original language description
The development of the optical bio-chemical sensing technology is an extremely important scientific and technological issue for diagnosis and monitoring of diseases, control of industrial processes, environmental detection of air and water pollutants. Owing to their distinctive features, chalcogenide amorphous thin films represent a keystone in the manufacture of middle infrared integrated optical devices for a sensitive detection of biological or environmental variations. Since the chalcogenide thin films characteristics, i. e. stoichiometric conformity, structure, roughness or optical properties can be affected by the growth process, the choice and control of the deposition method is crucial. An approach based on the experimental design is undoubtedly a way to be explored allowing fast optimization of chalcogenide film deposition by means of radio frequency sputtering process. Argon (Ar) pressure, working power and deposition time were selected as potentially the most influential factors among all possible. The experimental design analysis confirms the great influence of the Ar pressure on studied responses: chemical composition, refractive index in near-IR (1.55 mu m) and middle infrared (6.3 and 7.7 mu m), band-gap energy, deposition rate and surface roughness.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
20506 - Coating and films
Result continuities
Project
<a href="/en/project/GA16-17921S" target="_blank" >GA16-17921S: Heterostructures based on chalcogenides for nonlinear optics and optical sensors</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2017
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Scientific Reports
ISSN
2045-2322
e-ISSN
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Volume of the periodical
7
Issue of the periodical within the volume
June
Country of publishing house
GB - UNITED KINGDOM
Number of pages
14
Pages from-to
"3500-1"-"3500-14"
UT code for WoS article
000403318400054
EID of the result in the Scopus database
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