Optical properties and surface structuring of Ge20Sb5S75 amorphous chalcogenide thin films deposited by spin-coating and vacuum thermal evaporation

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216275%3A25310%2F18%3A39912616" target="_blank" >RIV/00216275:25310/18:39912616 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1016/j.matchemphys.2017.10.025" target="_blank" >http://dx.doi.org/10.1016/j.matchemphys.2017.10.025</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.matchemphys.2017.10.025" target="_blank" >10.1016/j.matchemphys.2017.10.025</a>

Result language
angličtina
Original language name
Optical properties and surface structuring of Ge20Sb5S75 amorphous chalcogenide thin films deposited by spin-coating and vacuum thermal evaporation
Original language description
Thin amorphous films of Ge20Sb5S75 composition have been deposited by spin-coating and vacuum thermal evaporation techniques. Their optical properties were investigated by spectroscopic ellipsometry in UV-NIR spectral region. We report on the comparison of thermo- and photo-induced changes in optical parameters, structure and chemical resistance of studied samples. Induced changes of films structure connected with changes of chemical stability were exploited for their surface structuring by photolithography and electron beam lithography.
Czech name
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Czech description
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Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
—
OECD FORD branch
20506 - Coating and films

Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2018
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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